Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)

Direct laser writing (DLW) is an advanced fabrication technique that allows users to create complex 3D microstructures from polymer precursors. These microstructures can be integrated with micro-electromechanical systems (MEMS) actuators. MEMS actuators provide a convenient platform for interacting with the intricate microstructures, either to characterize their mechanical properties or cause them to deform. Structures are fabricated directly onto electrostatic comb drives and chevron thermal actuators that are produced using a commercial foundry process. By applying a voltage to the MEMS actuators, highly controlled deformation of these microstructures is observed. Mechanical behaviors of microstructures produced with different materials and fabrication conditions are compared. MEMS-DLW integration is a convenient approach to characterizing the mechanics of DLW microstructures and may well lead to a new class of dynamic 3D devices for applications ranging from tissue engineering to imaging.