Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)
出版年份 2018 全文链接
标题
Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS)
作者
关键词
-
出版物
Advanced Materials Technologies
Volume 3, Issue 3, Pages 1700293
出版商
Wiley
发表日期
2018-01-22
DOI
10.1002/admt.201700293
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