Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins

标题
Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
作者
关键词
-
出版物
Optica
Volume 5, Issue 7, Pages 884
出版商
The Optical Society
发表日期
2018-07-19
DOI
10.1364/optica.5.000884

向作者/读者发起求助以获取更多资源

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started