Journal
MRS COMMUNICATIONS
Volume 8, Issue 2, Pages 226-240Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1557/mrc.2018.75
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Funding
- EPSRC [EP/N008065/1, EP/K005693/1]
- Royal Society [IE140211]
- EPSRC [1816190, EP/N008065/1, EP/K005693/1] Funding Source: UKRI
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The helium ion microscope (HeIM) holds immense promise for nano-engineering and imaging with scope for in-situ chemical analysis. Here we will examine the potential of secondary electron hyperspectral imaging (SEHI) as a new route to exploring chemical variations in both two and three dimensions. We present a range of early applications in the context of image interpretation in wider materials science and process control in ion beam-based nano-engineering. Necessary steps for SEHI in the HeIM to evolve into a reliable technique which can be fully embedded into nano-engineering workflows are considered.
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