Journal
RSC ADVANCES
Volume 8, Issue 36, Pages 20117-20123Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c8ra02644k
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Funding
- National Key Research and Development Program of China [2017YFA0205700]
- National Natural Science Foundation of China [21373046, 61605082, 21327902]
- Natural Science Foundation of Jiangsu Province [BK20160969]
- Natural Science Foundation of the Jiangsu Higher Education Institutions of China [16KJB510020]
- Priority Academic Program Development of Jiangsu Higher Education Institutions (PAPD)
- China Postdoctoral Science Foundation [2017M611654]
- Jiangsu Postdoctoral Science Foundation [1701074B]
- Startup Foundation for Introducing Talent of NUIST [2015r040]
- Jiangsu Key Laboratory of Meteorological Observation and Information Processing [KDXS1506]
- Jiangsu Science and Technology Department [BE2014707]
- Program for New Century Excellent Talents in University
- Fundamental Research Funds for the Central Universities
- Six Talent Peaks Project of Jiangsu Province
- Singapore Ministry of Education [MOE2011-T3-1-005]
- ASTAR QTE Programme Grant [SERC A1685b0005]
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In this study, direct laser writing (DLW) lithography is employed to fabricate a large-scale and high-numerical-aperture super-oscillatory lens (SOL), which is capable of achieving a sub-Abbe-Rayleigh diffraction limit focus in the optical far-field region by delicate interference. Large-diameter (600 m), amplitude-modulated and phase-type SOLs with the smallest annular ring width of 1 m are fabricated, and they have high quality. The dependence of DLW printing on the fabrication parameters including substrate materials, laser power, and scanning speed is well investigated. A standard procedure to manufacture high-quality binary amplitude SOLs is presented, which avoids direct printing patterns on metal films and reduces the surface roughness dramatically. Random displacements between squares constituting SOLs are discussed, and their influence on the focusing performance is studied by both numerical simulations and experiments. The optical performances of the SOLs fabricated by the DLW method are experimentally characterized, and a needle-like focus with a spot size of 0.42 and a depth of focus of approximate to 6 m are confirmed at a working distance of 100 m for = 633 nm, thus giving an effective numerical aperture as high as 1.19 in air. As a complementary sub-micrometer fabrication method between traditional lithography and nanofabrication method, DLW is proved to be a promising approach to manufacture SOLs, presenting advantages of relatively high speed, low equipment volume, less complexity and sub-micrometer lateral resolution. Such SOLs can be very useful in high resolution bio-imaging on rough surfaces and in the related research fields.
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