Theoretical model and experimental analysis of chemical mechanical polishing with the effect of slurry for abrasive removal depth and surface morphology of silicon wafer

标题
Theoretical model and experimental analysis of chemical mechanical polishing with the effect of slurry for abrasive removal depth and surface morphology of silicon wafer
作者
关键词
-
出版物
TRIBOLOGY INTERNATIONAL
Volume 117, Issue -, Pages 119-130
出版商
Elsevier BV
发表日期
2017-08-31
DOI
10.1016/j.triboint.2017.08.021

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