Preparation of a novel catalyst (SoFe III ) and its catalytic performance towards the removal rate of sapphire substrate during CMP process

标题
Preparation of a novel catalyst (SoFe III ) and its catalytic performance towards the removal rate of sapphire substrate during CMP process
作者
关键词
-
出版物
TRIBOLOGY INTERNATIONAL
Volume 120, Issue -, Pages 99-104
出版商
Elsevier BV
发表日期
2017-12-13
DOI
10.1016/j.triboint.2017.12.016

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