Journal
SURFACE & COATINGS TECHNOLOGY
Volume 343, Issue -, Pages 49-56Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2017.11.020
Keywords
Glancing angle deposition (GLAD); Zinc oxide; CO; Gas sensor
Funding
- Department of Science and Technology (DST) [DST/TSG/ME/2013/58]
- University of Delhi (DU)
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In the present work, Nanostructured ZnO sensing layers having preferred orientation along (002) plane have been grown by rf sputtering technique in glancing angle deposition (GLAD) configuration. ZnO nanostructures grown at a GLAD angle of 70 degrees exhibit sensing response of about 5.75 x 10(2) at a relatively lower operating temperature of 150 degrees C towards 500 ppm of CO gas. Afterwards the optimized ZnO sensing element has been decorated with the Pd catalyst and an enhanced CO gas sensing response of 1.022 x 10(3) has been obtained with quick response time and recovery time of 17 s and 23 s respectively. The fabricated Pd/ZnO sensing element is found to be highly selective towards detection of target CO gas. The possible sensing mechanism has been explained in detail.
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