Preparation of composite micro/nano structure on the silicon surface by reactive ion etching: Enhanced anti-reflective and hydrophobic properties

出版年份 2018 全文链接

标题

作者

关键词

Composite micro/nano structure, Wet chemical etching, Reactive ion etching(RIE), Anti-reflection, Hydrophobicity

出版物

Volume 117, Issue -, Pages 144-154

出版商

Elsevier BV

发表日期

2018-03-19

DOI

10.1016/j.spmi.2018.03.035

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