Femtosecond Laser Direct Writing Assisted Nonequilibriumly Doped Silicon n+-p Photodiodes for Light Sensing

Published 2015 View Full Article

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Title
Femtosecond Laser Direct Writing Assisted Nonequilibriumly Doped Silicon n+-p Photodiodes for Light Sensing
Authors
Keywords
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Journal
IEEE SENSORS JOURNAL
Volume 15, Issue 8, Pages 4259-4263
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-03-21
DOI
10.1109/jsen.2015.2414953

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