Femtosecond Laser Direct Writing Assisted Nonequilibriumly Doped Silicon n+-p Photodiodes for Light Sensing

标题
Femtosecond Laser Direct Writing Assisted Nonequilibriumly Doped Silicon n+-p Photodiodes for Light Sensing
作者
关键词
-
出版物
IEEE SENSORS JOURNAL
Volume 15, Issue 8, Pages 4259-4263
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2015-03-21
DOI
10.1109/jsen.2015.2414953

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