High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

Published 2018 View Full Article

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Title
High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching
Authors
Keywords
Functional polymer, Inductive coupled plasma, Porous MIM-type capacitive humidity sensor, Reactive ion etching, TiO, 2, microparticles
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 258, Issue -, Pages 704-714
Publisher
Elsevier BV
Online
2017-11-21
DOI
10.1016/j.snb.2017.11.060

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