High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching

出版年份 2018 全文链接

标题

作者

关键词

Functional polymer, Inductive coupled plasma, Porous MIM-type capacitive humidity sensor, Reactive ion etching, TiO, 2, microparticles

出版物

SENSORS AND ACTUATORS B-CHEMICAL

Volume 258, Issue -, Pages 704-714

出版商

Elsevier BV

发表日期

2017-11-21

DOI

10.1016/j.snb.2017.11.060

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