Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
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Title
Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators
Authors
Keywords
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Journal
SENSORS
Volume 18, Issue 7, Pages 2157
Publisher
MDPI AG
Online
2018-07-05
DOI
10.3390/s18072157
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