Thermoelastic Damping in Hollow and Slotted Microresonators

Published 2009 View Full Article

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Title
Thermoelastic Damping in Hollow and Slotted Microresonators
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 18, Issue 3, Pages 725-735
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2009-04-24
DOI
10.1109/jmems.2009.2016287
References
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