High Performance of Self-Aligned Transparent Polysilicon-Gate Thin-Film Transistors by NiSi2 Seed-Induced Lateral Crystallization

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Title
High Performance of Self-Aligned Transparent Polysilicon-Gate Thin-Film Transistors by NiSi2 Seed-Induced Lateral Crystallization
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 36, Issue 2, Pages 147-149
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-12-10
DOI
10.1109/led.2014.2378791

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