Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes

标题
Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes
作者
关键词
-
出版物
NANOTECHNOLOGY
Volume 29, Issue 14, Pages 145302
出版商
IOP Publishing
发表日期
2018-01-31
DOI
10.1088/1361-6528/aaabce

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