A novel triangular-electrode based capacitive sensing method for MEMS resonant devices

Published 2016 View Full Article

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Title
A novel triangular-electrode based capacitive sensing method for MEMS resonant devices
Authors
Keywords
Capacitive sensing, Capacitive detection, Triangular electrode, Self-calibration, MEMS resonant devices
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 252, Issue -, Pages 233-241
Publisher
Elsevier BV
Online
2016-10-29
DOI
10.1016/j.sna.2016.10.016

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