Integration of thin film of metal-organic frameworks in metal-insulator-semiconductor capacitor structures

Published 2018 View Full Article

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Title
Integration of thin film of metal-organic frameworks in metal-insulator-semiconductor capacitor structures
Authors
Keywords
Metal-insulator-semiconductor capacitor, MIS capacitor, Metal-organic frameworks, MOFs, Cu, 3, (BTC), 2, Interface traps
Journal
MICROPOROUS AND MESOPOROUS MATERIALS
Volume 265, Issue -, Pages 185-188
Publisher
Elsevier BV
Online
2018-02-18
DOI
10.1016/j.micromeso.2018.02.018

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