Integration of thin film of metal-organic frameworks in metal-insulator-semiconductor capacitor structures

出版年份 2018 全文链接

标题

作者

关键词

Metal-insulator-semiconductor capacitor, MIS capacitor, Metal-organic frameworks, MOFs, Cu, 3, (BTC), 2, Interface traps

出版物

Volume 265, Issue -, Pages 185-188

出版商

Elsevier BV

发表日期

2018-02-18

DOI

10.1016/j.micromeso.2018.02.018

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