Role of highly doped Si substrate in bipolar resistive switching of silicon nitride MIS-capacitors

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Title
Role of highly doped Si substrate in bipolar resistive switching of silicon nitride MIS-capacitors
Authors
Keywords
Memristor, Silicon nitride, Capacitor, Bipolar resistive switching, Small-signal measurements, Light illumination
Journal
MICROELECTRONIC ENGINEERING
Volume 187-188, Issue -, Pages 134-138
Publisher
Elsevier BV
Online
2017-11-07
DOI
10.1016/j.mee.2017.11.002

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