Influence of substrate bias voltage on crystallographic structure, optical and electronic properties of Al/(Ta 2 O 5 ) 0.85 (TiO 2 ) 0.15 /p-Si MIS Schottky barrier diodes fabricated by dc magnetron sputtering

Published 2018 View Full Article

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Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Volume 76, Issue -, Pages 80-86

Publisher

Elsevier BV

Online

2018-01-09

DOI

10.1016/j.mssp.2018.01.001

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MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

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