A comparison of He and Ne FIB imaging of cracks in microindented silicon nitride

Published 2018 View Full Article

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Title
A comparison of He and Ne FIB imaging of cracks in microindented silicon nitride
Authors
Keywords
-
Journal
MATERIALS CHARACTERIZATION
Volume 141, Issue -, Pages 362-369
Publisher
Elsevier BV
Online
2018-05-03
DOI
10.1016/j.matchar.2018.05.006

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