Critical Role of Interlayer in Hf0.5Zr0.5O2 Ferroelectric FET Nonvolatile Memory Performance

标题
Critical Role of Interlayer in Hf0.5Zr0.5O2 Ferroelectric FET Nonvolatile Memory Performance
作者
关键词
-
出版物
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 65, Issue 6, Pages 2461-2469
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2018-04-28
DOI
10.1109/ted.2018.2829122

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