Large-Area, Single-Layer Molybdenum Disulfide Synthesized at BEOL Compatible Temperature as Cu Diffusion Barrier

Published 2018 View Full Article

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Title
Large-Area, Single-Layer Molybdenum Disulfide Synthesized at BEOL Compatible Temperature as Cu Diffusion Barrier
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 6, Pages 873-876
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-04-17
DOI
10.1109/led.2018.2827061

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