Sub-100 nm2 Cobalt Interconnects

Published 2018 View Full Article

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Title
Sub-100 nm2 Cobalt Interconnects
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 5, Pages 731-734
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-04-03
DOI
10.1109/led.2018.2821923

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