Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film

Published 2018 View Full Article

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Title
Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 5, Pages 749-752
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-03-17
DOI
10.1109/led.2018.2816646

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