Finite Size Effects in Highly Scaled Ruthenium Interconnects

Title
Finite Size Effects in Highly Scaled Ruthenium Interconnects
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 39, Issue 2, Pages 268-271
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-01-02
DOI
10.1109/led.2017.2788889

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