Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography

Title
Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 30, Issue 4, Pages 1209-1217
Publisher
American Chemical Society (ACS)
Online
2018-02-05
DOI
10.1021/acs.chemmater.7b03501

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