Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography

标题
Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography
作者
关键词
-
出版物
CHEMISTRY OF MATERIALS
Volume 30, Issue 4, Pages 1209-1217
出版商
American Chemical Society (ACS)
发表日期
2018-02-05
DOI
10.1021/acs.chemmater.7b03501

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