Layer thickness effect on fracture behavior of Al/Si 3 N 4 multilayer on Si substrate under three-point bending

Published 2018 View Full Article

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Title
Layer thickness effect on fracture behavior of Al/Si 3 N 4 multilayer on Si substrate under three-point bending
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 445, Issue -, Pages 563-567
Publisher
Elsevier BV
Online
2018-02-25
DOI
10.1016/j.apsusc.2018.02.223

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