Layer thickness effect on fracture behavior of Al/Si 3 N 4 multilayer on Si substrate under three-point bending

出版年份 2018 全文链接

标题

Layer thickness effect on fracture behavior of Al/Si 3 N 4 multilayer on Si substrate under three-point bending

作者

关键词

-

出版物

APPLIED SURFACE SCIENCE

Volume 445, Issue -, Pages 563-567

出版商

Elsevier BV

发表日期

2018-02-25

DOI

10.1016/j.apsusc.2018.02.223

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