Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
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Title
Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 112, Issue 17, Pages 171606
Publisher
AIP Publishing
Online
2018-04-26
DOI
10.1063/1.5026362
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