Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
出版年份 2018 全文链接
标题
Nanoscale patterning of electronic devices at the amorphous LaAlO3/SrTiO3 oxide interface using an electron sensitive polymer mask
作者
关键词
-
出版物
APPLIED PHYSICS LETTERS
Volume 112, Issue 17, Pages 171606
出版商
AIP Publishing
发表日期
2018-04-26
DOI
10.1063/1.5026362
参考文献
相关参考文献
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