Improvement of the Correlative AFM and ToF-SIMS Approach Using an Empirical Sputter Model for 3D Chemical Characterization

Title
Improvement of the Correlative AFM and ToF-SIMS Approach Using an Empirical Sputter Model for 3D Chemical Characterization
Authors
Keywords
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Journal
ANALYTICAL CHEMISTRY
Volume 90, Issue 3, Pages 1701-1709
Publisher
American Chemical Society (ACS)
Online
2017-12-23
DOI
10.1021/acs.analchem.7b03431

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