Atomic Layer Deposition of Nickel Carbide from a Nickel Amidinate Precursor and Hydrogen Plasma

标题
Atomic Layer Deposition of Nickel Carbide from a Nickel Amidinate Precursor and Hydrogen Plasma
作者
关键词
-
出版物
ACS Applied Materials & Interfaces
Volume 10, Issue 9, Pages 8384-8390
出版商
American Chemical Society (ACS)
发表日期
2018-02-15
DOI
10.1021/acsami.8b00388

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