The Chemistry of Inorganic Precursors during the Chemical Deposition of Films on Solid Surfaces

Title
The Chemistry of Inorganic Precursors during the Chemical Deposition of Films on Solid Surfaces
Authors
Keywords
-
Journal
ACCOUNTS OF CHEMICAL RESEARCH
Volume 51, Issue 3, Pages 800-809
Publisher
American Chemical Society (ACS)
Online
2018-03-01
DOI
10.1021/acs.accounts.8b00012

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