The Chemistry of Inorganic Precursors during the Chemical Deposition of Films on Solid Surfaces

标题
The Chemistry of Inorganic Precursors during the Chemical Deposition of Films on Solid Surfaces
作者
关键词
-
出版物
ACCOUNTS OF CHEMICAL RESEARCH
Volume 51, Issue 3, Pages 800-809
出版商
American Chemical Society (ACS)
发表日期
2018-03-01
DOI
10.1021/acs.accounts.8b00012

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