A Novel Two-Step Ammonia-Free Atomic Layer Deposition Approach for Boron Nitride
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Title
A Novel Two-Step Ammonia-Free Atomic Layer Deposition Approach for Boron Nitride
Authors
Keywords
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Journal
ChemNanoMat
Volume 3, Issue 9, Pages 656-663
Publisher
Wiley
Online
2017-07-29
DOI
10.1002/cnma.201700148
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