Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems

Title
Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems
Authors
Keywords
-
Journal
Advanced Electronic Materials
Volume 3, Issue 8, Pages 1700077
Publisher
Wiley
Online
2017-06-06
DOI
10.1002/aelm.201700077

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