Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems

标题
Thin, Transferred Layers of Silicon Dioxide and Silicon Nitride as Water and Ion Barriers for Implantable Flexible Electronic Systems
作者
关键词
-
出版物
Advanced Electronic Materials
Volume 3, Issue 8, Pages 1700077
出版商
Wiley
发表日期
2017-06-06
DOI
10.1002/aelm.201700077

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