Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Title
Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics
Authors
Keywords
-
Journal
Applied Physics Reviews
Volume 4, Issue 1, Pages 011104
Publisher
AIP Publishing
Online
2017-03-22
DOI
10.1063/1.4978290

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