Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges
Published 2017 View Full Article
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Title
Design, Manufacture and Testing of Capacitive Pressure Sensors for Low-Pressure Measurement Ranges
Authors
Keywords
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Journal
Micromachines
Volume 8, Issue 2, Pages 41
Publisher
MDPI AG
Online
2017-02-01
DOI
10.3390/mi8020041
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