Reducing wrinkles and cracks of metal films on PDMS substrate by hexane extraction and oxygen plasma etching

Published 2014 View Full Article

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Title
Reducing wrinkles and cracks of metal films on PDMS substrate by hexane extraction and oxygen plasma etching
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 130, Issue -, Pages 8-12
Publisher
Elsevier BV
Online
2014-08-20
DOI
10.1016/j.mee.2014.08.007

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