Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering

Published 2017 View Full Article

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Title
Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering
Authors
Keywords
Reactive magnetron sputtering, TiN-Ag films, Microstructure, Mechanical and tribological properties
Journal
VACUUM
Volume 141, Issue -, Pages 82-88
Publisher
Elsevier BV
Online
2017-03-23
DOI
10.1016/j.vacuum.2017.03.026

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