Microstructure, mechanical and tribological properties of TiN-Ag films deposited by reactive magnetron sputtering

出版年份 2017 全文链接

标题

作者

关键词

Reactive magnetron sputtering, TiN-Ag films, Microstructure, Mechanical and tribological properties

出版物

VACUUM

Volume 141, Issue -, Pages 82-88

出版商

Elsevier BV

发表日期

2017-03-23

DOI

10.1016/j.vacuum.2017.03.026

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