Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrN x hard coatings deposited by reactive magnetron sputtering

Published 2017 View Full Article

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Title
Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrN x hard coatings deposited by reactive magnetron sputtering
Authors
Keywords
Chromium nitride coating, Reactive magnetron sputtering, Chemical composition, Microstructure, Mechanical properties
Journal
VACUUM
Volume 145, Issue -, Pages 136-143
Publisher
Elsevier BV
Online
2017-09-02
DOI
10.1016/j.vacuum.2017.08.036

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