Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrN x hard coatings deposited by reactive magnetron sputtering

标题
Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrN x hard coatings deposited by reactive magnetron sputtering
作者
关键词
Chromium nitride coating, Reactive magnetron sputtering, Chemical composition, Microstructure, Mechanical properties
出版物
VACUUM
Volume 145, Issue -, Pages 136-143
出版商
Elsevier BV
发表日期
2017-09-02
DOI
10.1016/j.vacuum.2017.08.036

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