Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

Published 2017 View Full Article

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Title
Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure
Authors
Keywords
Plasma jet, Liquid assisted plasma enhanced chemical vapour deposition, Silicon oxide, Hexamethyldisiloxane, Octamethyltetrasiloxane, Tetrakis(trimethylsilyloxy)silane
Journal
THIN SOLID FILMS
Volume 630, Issue -, Pages 71-78
Publisher
Elsevier BV
Online
2016-09-16
DOI
10.1016/j.tsf.2016.09.022

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