Liquid assisted plasma enhanced chemical vapour deposition with a non-thermal plasma jet at atmospheric pressure

出版年份 2017 全文链接

标题

作者

关键词

Plasma jet, Liquid assisted plasma enhanced chemical vapour deposition, Silicon oxide, Hexamethyldisiloxane, Octamethyltetrasiloxane, Tetrakis(trimethylsilyloxy)silane

出版物

THIN SOLID FILMS

Volume 630, Issue -, Pages 71-78

出版商

Elsevier BV

发表日期

2016-09-16

DOI

10.1016/j.tsf.2016.09.022

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